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Kaushik Ghosh, Jiye Zhang, Lin Zhang, Yuanwei Dong, Hongyu Li, Cher Ming Tan, Guangrui Xia, and Chuan Seng Tan, "Integration of Low-Dielectric Liner in Through Silicon Via and Thermomechanical Stress Relief", Applied Physics Express , vol. 5, 11/2012. Tagged XML BibTex