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R.V.R. Murthy, P. Servati, A. Nathan, S.G. Chamberlain, "Optimization of n+ uc-Si:H contact layer for low leakage current in a-Si:H thin film transistors", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 18, issue 2, pp. 685-687, 2000  . Tagged XML BibTex