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2008
Chaitanya, C.R.A., Takahata, K., "Micro-Electro-Discharge Machining by MEMS Actuators with Planar Electrodes Microfabricated on the Work Surfaces", 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AL, USA, pp. 375-378, 2008. Tagged XML BibTex