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ICICS X027 - MEMS

UBC MEMS Laboratory

Research Objectives of the UBC MEMS Laboratory

  • Fabrication of novel miniature devices for biomedical applications and environmental monitoring
  • Development of new microflow control strategies
  • Investigation of complex fluids in microfluidic environments

Infrastructure at UBC for MEMS Fabrication and Testing

Current Research Topics

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Equipment

Laser Doppler Vibrometer

The laser Doppler vibrometer Polytec OFV-5000 allows single-point vibration measurement. It is coupled into a microscope to measure vertical surface motion of MEMS devices.

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MicroPIV

The LaVision Flow Master 2-D µPIV System is designed to measure velocity fields of particle seeded flows with micron scale spatial resolution using particle image velocimetry (PIV) techniques. The light source is a double pulsed Nd:YAG laser that is focused by an epifluorescence microscope with a high numerical aperture on a microfluidic device.

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Optical Profiler
Wyko NT1100 Optical Profiling System

The Wyko NT1100 Optical Profiling System provides accurate, non- contact surface metrology at sub-nanometer vertical resolution. The optional Through Transmissive Material (TTM) capability of this tool allows measurement of the topology of a sample through an optically transparent material such as a glass cover.

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Wyko NT1100 Optical Profiling System
Inverted Fluorescence Microscope, Nikon
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MEMS Pro

MEMS Pro™ is engineered by MEMS designers for non-specialists and MEMS specialists alike, providing a unified MEMS and IC design environment.

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Probe Station, Signatone S-1160

Optical Microscope with needle tip manipulators

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Wire-bonder

Wire bonding machines are used to connect electrical wires to silicon chips

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